Troubleshooting
56
GA 05.139/1.02 - 06/99
Failure Message on
Display
TMS 2
The converter measures a
heating current of more than
4 A.
TMS 3
TMS temperature sensor
reads a temperature higher
than 99 °C.
TMS 4
TMS temperature sensor
reads a temperature lower
than 1 °C.
TMS 5
TMS temperature sensor
reads a temperature higher
than the TMS setpoint + 15
°C.
Measures
Check the line voltage (200-240 V +10% / -15%).
Repeat step 2of failure TMS 1. In case the measu-
red value is less than 60 Ω contact Leybold servi-
ce.
Contact Leybold service.
Step 1: Check TMS sensor
Check pump connector X30. In particular measure
resistance between pins X30/F and X30/H as well
as between pins X30/H and X30/G. The resistance
is typically between 110 Ω and 130 Ω (20 °C to 70
°C).
Step 2: Additional TMS sensor test
If temperature sensor TMS (Pt 100) has the correct
resistance, unplug it while the pump is on power.
The water valve should open instantly with a
clicking noise and a red LED inside the cooling
water valve connector lighting up. This LED should
be on if the actual TMS temperature is higher than
the TMS setpoint + 2 °C.
Contact Leybold service if the sensor is defective.
Step 3: Check TMS/DRIVE cable
Check TMS/DRIVE cable connector X21. In parti-
cular measure resistance between pins X21/K and
X21/M as well as between pins X21/K and X21/L.
The resistance is typically between 110 Ω and 130
Ω (20 °C to 70 °C).
Contact Leybold service if the TMS/DRIVE cable is
damaged.
Contact Leybold service.
Repeat steps 1 and 2 of failure TMS 3. Contact
Leybold service if the sensor is defective.
Repeat step 3 of failure TMS 3. Contact Leybold
service if the cable is damaged.
Contact Leybold service.
Apply cooling water according to specifications.
Check cooling water tubes for deposits. See also
Section 2.6.
Repeat step 2 of failure TMS 3. Contact Leybold
service if cooling water valve is malfunctioning.
Check the TMS setpoint (default 62 °C). For the
correct settings refer to Section 4.3.4.
Check chamber temperature.
Possible Cause
Overvoltage.
Heating element defective.
Converter failure.
TMS sensor damaged.
TMS/DRIVE cable damaged.
Converter failure.
TMS sensor short-circuited.
TMS/DRIVE cable short-circuited.
Converter failure.
Cooling water flow too low or cooling
water temperature too high.
Cooling water valve malfunctioning.
Wrong TMS temperature setpoint.
Temperature at the high-vacuum
connection flange or at the isolation
valve is much higher than 85 °C.
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