LEYBOLD MAG W 2200 iP - Technical Data

Description
13300324726_002_C0 - 10/2016 - © Leybold
1.3 Technical data
MAG W 1300 iP(L) 1600 iP(L) Booster 1700 iP(L) 2200 iP(L)
High-vacuum flange DN 200 ISO-F 250 ISO-F 250 ISO-F 250 ISO-F
200 CF 250 CF 250 CF
Pumping speed (PNEUROP) I · s
-1
N
2
1100 1600 1610 2100
Ar 1050 1470 1480 1900
He 1220 1770 1710 2050
H
2
1130 1570 1660 1750
Max. Compression
N
2
> 10
8
> 10
7
> 10
8
> 10
8
Ar > 10
8
> 10
7
> 10
8
> 10
8
He at 1 sccm 2 · 10
5
6 · 10
4
2 · 10
5
5 · 10
4
H
2
at 1 sccm 8 · 10
3
1 · 10
3
4 · 10
3
5 · 10
3
Max. gas throughput
1) 2)
mbar · I · s
-1
N
2
temporary, for pump down 30 60 30 30
N
2
continuous operation 20 30 20 17
Ar temporary, for pump down 20 30 20 20
Ar continuous operation 15 20 15 12
Max. forevacuum pressure
2)
N
2
/Ar mbar 4 1 4 2.5
Nominal speed 37,800 min
-1
33,000 min
-1
33,000 min
-1
30,600 min
-1
Stand-by speed to be set between 13,800 min
-1
(230 Hz)
and nominal speed
Ultimate pressure ISO-F / CF flange < 10
-8
mbar / < 10
-10
mbar
Max. bake-out temperature 80 °C
Run-up time < 5 min < 7 min < 7 min < 10 min
Forevacuum flange DN 40 KF
Purge gas / venting flange DN 16 KF (clamp shoe)
Cooling connection G 1/8”
Weight, approx. 40 kg 45 kg 45 kg 50 kg
Noise level acc. to ISO 3744 < 41 db(A)
Vibration level at high-vacuum flange at max. speed < 0.01 µm
1) The maximum gas throughput for continuous operation in connection with N
2
or Ar is attainable with a cooling water temperature below
25 °C and a forevacuum pump system having a pumping speed of over 600 m
3
/h. These values may differ for other operating conditions.
2) Maximum gas throughput and maximum forevacuum pressure cannot be attained simultaneously.