Safety Information
8 300324726_002_C0 - 10/2016 - © Leybold
0.5 Danger of ignition
1 During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120°C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
CAUTION
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