Contents
2 300324726_002_C0 - 10/2016 - © Leybold
Page
0 Important Safety Information 5
0.1 Mechanical hazards 5
0.2 Electrical hazards 6
0.3 Thermal hazards 7
0.4 Hazards caused by materials and substances 7
0.5 Danger of ignition 8
0.6 Risk of damaging the pump 9
1 Description 10
1.1 Design and function 11
1.2 Supplied equipment 12
1.3 Technical data 13
1.4 Ordering data 20
1.5 Accessories 21
2 Transport and storing 22
3 Installation 23
3.1 Conforming utilization 23
3.1.1 Non-conforming utilization 23
3.2 Operating environment 25
3.3 Attach the pump to the vacuum chamber 25
3.4 Forevacuum connection 30
3.5 Connecting the cooling water 31
3.5.1 Water Quality 32
3.6 Connect the purge gas and venting valve 34
3.7 Electrical connection for the integrated frequency converter 35
3.8 Relays, LEDs, PLC interface 36
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