Contents
3300324726_002_C0 - 10/2016 - © Leybold
Original installation and operating instructions.
4 Operation 38
4.1 Media compatibility / purge gas 38
4.2 Interfaces 38
4.3 Switching on 39
4.4 Operation 39
4.5 Switching off 40
4.6 Venting 41
4.7 Removing the pump from the system 42
5 Maintenance 43
5.1 Cleaning 43
5.2 Changing the touch-down bearings 44
5.3 Leybold Service 44
6 Troubleshooting 45
7 Waste Disposal 46
EC Incorporation Declaration 47
EC Declaration of Conformity 48
Certificates 49
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