Safety Information
5300324726_002_C0 - 10/2016 - © Leybold
0 Important Safety Information
0.1 Mechanical hazards
1 Avoid exposing any part of the human body to the vacuum.
2 The pressure in the pump must not exceed 1.4 bar (absolute).
3 The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4 Vent the pump only up to atmospheric pressure.
5 When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6 The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the informa-
tion in Section 3.3.
7 We recommend to change the rotor after 80,000 hours of operation or
20,000 cycles at the latest. Due to high-speed and temperature, the
service life of the rotor is limited. If the rotor is changed too late, it may
be destroyed. Thus in the flange mounts high forces and torque condi-
tions can occur. The mounting screws for the pump may be torn off.
When using clamped flange connections at the housing or with com-
ponents above the housing, sudden twisting of the entire pump can be
experienced.
8 Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9 To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
WARNING
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