Tool Operation
1) Log on to the FOM
2) LOAD THE SUBSTRATE
Press the “MAN OP” button and then press the
“BLEED” button to vent the chamber.
When the chamber is vented (about 60 s for venting),
unlatch the chamber door and insert sample.
o Put your sample on desired shelf (see shelves
configuration above and test result in Appendix
B)
o Close and latch the chamber door.
o Press the “MAN OP” button again to activate
the automatic operation mode (“MAN OP” LED
light is extinguished for auto operation).
3) PROGRAMMING
Standard setting for parameters:
Pressure=0
END/PT= 100
BP/RP= 50 mTorr
Press the “PROGRAM” button to select your program
Press the “L DISP” button repeatedly until the “TIME”
label lights up
o Press the “SET” button to illuminate its LED light
o Press the “DECR or INCR” buttons to set the
plasma “on” time (sec) by decreasing or
increasing the time in the left display above.
o When the correct time appears in the display,
press the “SET” button again to extinguish the
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