upper left corner. This starts the
process:
o Chamber is pumped down to 50 millitorr
o Gas flow is started
o RF Power is turned on – Note the forward and
reflected power values on the RF power supply to
the left of the process control module. If the
reverse power is more than 50%, shut off the
system with the BIG RED EMO button and call a
staff member.
o Time counts down from your set value
o At the conclusion of the time, the RF power and
Gas flow are turned off and the chamber is
pumped down to base pressure.
o After achieving base pressure, the chamber is
vented with Nitrogen for 45 seconds.
o At the conclusion of the vent cycle, a beeper peeps
softly.
5) RETREVING THE SUBSTRATE
• At the end of the vent cycle, shut off the beeper by
pressing the “STOP” button. Open the door and
retrieve your sample. Be careful to note the
temperature of the substrate shelf as it can get hot on
long runs.
• When the sample is out, close and latch the chamber
door
• Press the “MAN OP” button and the “VAC ON” button to
pump the chamber down again. Allow the vacuum to
achieve base pressure and then shut off the “VAC ON”
valve.
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