March PX-500 - RUNNING THE PROCESS

LED light. This saves the value.
Press the “L DISP” button to light up the “POWER”
label.
o Press the “SET” button to illuminate its LED light
o Press the “DECR or INCR” buttons to set the
plasma power (Watts) by decreasing or
increasing the Power in the left display above.
o When the correct power appears in the display,
press the “SET” button again to extinguish the
LED light. This saves the value.
Press the “R DISP” button on the right side to illuminate
the “GAS1” label.
o Press the “SET” button to illuminate its LED light
o Press the “DECR or INCR” buttons to set the O
2
(or Ar)
flow rate, (% of 100 sccm), by
decreasing or increasing the value in the right
display above.
o When the correct flow value appears in the
display, press the “SET” button again to
extinguish the LED light. This saves the
value.
o Consult the percent O
2 (Ar)
flow vs pressure chart
in Appendix B to determine the proper flow value
for your process pressure. The actual values may
drift somewhat over time as the vacuum pump oil
becomes contaminated, so some variance from
the table may be required as experience dictates.
4) RUNNING THE PROCESS
• Press the “START” button in the