Appendix A
Chamber Pressure vs Gas Flow Rate
Use this chart to decide what approximate gas flow is
needed to establish the pressure you need for your plasma.
You may have to fine adjust the flow to achieve accurate
pressure. As time goes on, the base pump pressure may
degrade and shift the lower end of this correlation curve
somewhat. Argon mass flow controller maximum flow is
250 sccm, and the Oxygen meter is 100 sccm – thus the
large difference in pressure curves.
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