wave into the vacuum diaphragm triggering a calibration drift
and possibly causing damage to the gauge. The proper
procedure is to open the valve and wait at least 15 seconds
before opening the vacuum line to the gauge.
RF Power Generator
The RF power generator is a separate unit sitting just
to the left of the Asher system. It provides the 13.6 MHz RF
power to drive the plasma. It is remotely controlled by the
process controller microprocessor, therefore the buttons on
the front panel of the RF generator are inactive but the
power meter indicates the forward and reverse power
delivered to the plasma chamber. This meter should
indicate mostly forward power and very little reverse power.
If you notice the reverse ratio shut off the plasma with the
big red EMO button to protect the RF generator from
overheating and contact NFCF staff.
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