12
BX51M
3-4 Stage
1 Placing the Specimen
}The maximum load capacities are as follows.
· Stage: 1.5 kg
· Stage plate: 500 g (U-SVRM/SVLM)
1 kg (U-SIC4R2/SIC4L2)
#Do not place a specimen which is heavier than above. Otherwise,
difficulty in stage movement or wear will result.
With the U-MSSP or U-MSSP4 Stage Plate
Place the specimen on the stage plate @ .
}The specimen should be parallel and planar. Otherwise, the reflected
light cannot reach the objective, rendering observation impossible.
}When observing very large specimens, remove the slide holder and place
the specimen directly on the stage.
[ U-SIC4R2/SIC4L2 Stage Only ]
Observation with the U-WHP2 Wafer Holder Plate (Fig. 15)
1. Place the BH2-WHR43 rotary wafer holder (for 3- or 4-inch) ² on the U-
WHP2 wafer holder plate @.
2. Place a 3-inch or 4-inch wafer on the BH2-WHR43 and observe the wa-
fer.
The wafer holder plate can be rotated with the knob ³.
[ U-SIC4R2/SIC4L2 Stage Only ]
Observation with the U-MSSPG Glass Holder Plate (Fig. 16)
}If the microscope is equipped with transmitted light illumination, trans-
parent specimens can also be observed.
1. Place the glass plate ² gently on the glass holder plate @.
2. Place a specimen or transparent specimen and observe it.
Fig. 14
Fig. 15
Fig. 16
@
@
²
³
@
²
To Next Page
Loading...
