About Communication Commands
42
ZFX-C Serial Communication Command Reference
Edge inspection parameters
Position
Width
Count
Data No. Parameter Output Range
0 Judgment result 0: OK
-1: NG
-2: not measured
1 Edge position X -9999.999 to 9999.999
2 Edge position Y -9999.999 to 9999.999
3 Reference position X -9999.999 to 9999.999
4 Reference position Y -9999.999 to 9999.999
5 Position difference X -9999.999 to 9999.999
6 Position difference Y -9999.999 to 9999.999
Data No. Parameter Output Range
0 Judgment result 0: OK
-1: NG
-2: not measured
1 Edge width 0 to 9999.999
2 Edge position X1 -9999.999 to 9999.999
3 Edge position Y1 -9999.999 to 9999.999
4 Edge position X2 -9999.999 to 9999.999
5 Edge position Y2 -9999.999 to 9999.999
6 Reference edge width 0 to 9999.999
7 Reference edge position X1 -9999.999 to 9999.999
8 Reference edge position Y1 -9999.999 to 9999.999
9 Reference edge position X2 -9999.999 to 9999.999
10 Reference edge position Y2 -9999.999 to 9999.999
11 Width difference -9999.999 to 9999.999
12 Position difference X1 -9999.999 to 9999.999
13 Position difference Y1 -9999.999 to 9999.999
14 Position difference X2 -9999.999 to 9999.999
15 Position difference Y2 -9999.999 to 9999.999
Data No. Parameter Output Range
0 Judgment result 0: OK
-1: NG
-2: not measured
1 Number of edges 0 to 255
2 Average pitch 0 to 9999.999
3 Minimum pitch 0 to 9999.999