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Test data
Note) Following data are the reference only.
AT20Υ, 50䠤䡖
Pull-down and Pull-up temperature
30
40
50
60
Υ]
AT20Υ, 50䠤䡖
Pull-down and Pull-up temperature
15 fluorescent lamps are illuminating
0
10
20
30
Temperature[Υ]
15 fluorescent lamps are not illuminating
-10
0
㻜㻜㻚㻡㻝㻝㻚㻡㻞㻞㻚㻡㻟㻟㻚㻡㻠
Time[h]
500
600
700
(W)
Chamber arrival temperature䠇
5䉝
(Fluorescent lamp: OFF)
Permissible heat loading dose
100
200
300
400
Chamber arrival temperature䠇10䉝
(15 fluorescent lamps turn on䠅
0
100
㻡 㻝㻜㻝㻡㻞㻜㻞㻡㻟㻜㻟㻡
Ambient temperature (䉝)