Measuring performance
NOTE: The following data is derived from high accuracy test rig measurements and may not represent the performance achievable
on a CMM. Please consult your CMM supplier for overall system accuracy information.
Performance at 10 mm stylus length
Probe module type Unidirectional repeatability*
﴾2σ﴿
2D (XY) form measurement deviation*
LF 0.35 µm ± 0.6 µm
SF 0.35 µm ± 0.8 µm
MF 0.5 µm ± 1 µm
EF 0.65 µm ± 2 µm
6-way 0.8 µm ± 1.5 µm
EM1 STD 0.35 µm ± 0.8 µm
EM2 STD 0.35 µm ± 0.8 µm
* Measured at a trigger speed of 8 mm/s
Test stylus ball diameter 4 mm
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