Maintenance Model 6DS-SP Planarizer
viii Version 4.0 - February 1998
Tables 127
Polish Table Removal and Installation 127
Removal 127
Installation 130
Table Alignment 133
Mechanical Maintenance Procedures for the Second
Table Option 137
Removal of Electrical Power for the Second Table at the Terminal Block 138
Measurement of the Present Load Chuck Height Position 139
Removal of the Load Chucks, Table, and Subtable 142
Second Table Load Position Shock Absorber Adjustments 147
Second Table Polish Position Shock Absorber Adjustments 155
Table Travel Cylinder Reed Switch Adjustments 165
Table Locking Cylinder Reed Switch Adjustments 169
Table Unlocking Cylinder Reed Switch Adjustments 172
Reinstallation of the Load Chucks, Table, and Subtable 174
Restoration of Load Chuck Height to the Previously Measured Position 178
Restoration of Electrical Power for the Second Table 180
Performance of Related Software Calibration Procedures 181
Chapter 10 Software Calibration
Procedures 10-1
OVERVIEW 4
Running a Short Test Cycle 4
Formulas Used in Software Calibration Procedures 5
ORDER OF ADJUSTMENT 6
MENUS USED IN MECHANICAL ADJUSTMENTS AND
SOFTWARE CALIBRATION PROCEDURES 7
Manual Control Menu (Screen Page 1) 11
Manual Control Menu (Screen Page 2) 15
Manual Control Menu (Screen Page 3) 18
Diagnostics Menu 21
Calibration/Configuration Menu 24
BRIDGE 26
Bridge Home Position Calibration 26
Bridge Load Position Calibration 31
Bridge Left/Right Curtain Position Calibration 34
Bridge Table 2 Position Calibration 37
CLEANING STATIONS 41
Cleaning Stations Adjustment Series--Order of Adjustment 41
Enhanced Cleaning Station Rotational Speed (Potentiometer) Calibration
[#3 in Cleaning Stations Adjustment Series] 42
CONDITIONING ARM 44
Conditioning Arm Adjustment Series--Order of Adjustment 44
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