Strasbaugh Table of Contents
Version 4.0 - February 1998 vii
Chapter 9 Mechanical Maintenance
OVERVIEW 4
Order of Adjustment 5
Menus Used in the Mechanical Maintenance Procedures 5
Running a Short Test Cycle 6
CARRIERS 8
Changing Wafer Backing Inserts 13
Assembly and Disassembly of a Carrier 15
Assembly of a Carrier 15
Disassembly of a Carrier 50
CLEANING STATIONS 51
Cleaning Stations Adjustment Series--Order of Adjustment 51
Cleaning Station Alignment 52
[#1 in Cleaning Stations Adjustment Series] 52
CONDITIONING ARM 55
Conditioning Arm Adjustment Series--Order of Adjustment 55
Conditioning Arm Switch Adjustments 56
[#1 in Conditioning Arm Adjustment Series] 56
ELEVATORS AND ROBOT--ORDER OF ADJUSTMENT 61
ELEVATORS AND ROBOT 62
Elevator Cassette Platform Leveling 62
[#1 in Elevators and Robot Adjustment Series] 62
Elevator Cassette Arm Sensor Switch Adjustments 68
[#2 in Elevators and Robot Adjustment Series] 68
ROBOT 71
Robot Leveling 72
[#A in Elevators and Robot Adjustment Series] 72
Robot Belt Tensioning 82
[#B in Elevators and Robot Adjustment Series] 82
LOAD STATIONS 85
Centering the Load Stations Under the Spindles 85
Load Station Alignment 87
SHUTTLE 91
Shuttle Travel Adjustments 91
Shuttle Forward Stop and Reed Switch Adjustment 91
Shuttle Rear Stop and Reed Switch Adjustment 99
SLURRY SYSTEM 107
Peristaltic Pump Line Replacement 107
Spindles 109
Spindle Alignment 109
Spindle Vacuum Chuck Alignment 114
Spindle Up/Down Limit Switch Adjustments 119
Spindle Vacuum Switch Adjustments 124
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