Strasbaugh Table of Contents
Version 4.0 - February 1998 ix
Programmable Arm Calibration
[#4 in Conditioning Arm Adjustment Series] 45
Controllable Conditioning Down Force Option Calibration
[#5 in Conditioning Arm Adjustment Series] 49
ELEVATORS AND ROBOT--ORDER OF ADJUSTMENT 57
ELEVATORS 59
Elevator Height Calibration
[#4 in Elevators and Robot Adjustment Series] 59
Universal Wafer Cassette Support 67
LOAD STATIONS 69
Load Chuck Vacuum Sensor Adjustment 69
ROBOT 74
Robot Up/Down (Z-Axis) Top, Middle, and Bottom Positions Calibration
[#3 in Elevators and Robot Adjustment Series] 75
Robot Arm Rotation (Theta) Calibration
[#5 in Elevators and Robot Adjustment Series] 79
Robot Arm Extension (Radial) and Travel (Linear) Calibration
[#6 in Elevators and Robot Adjustment Series] 83
Robot Up/Down (Z-Axis) Load Positions Calibration
[#7 in Elevators and Robot Adjustment Series] 104
Robot Vacuum Switch Wafer Sensing Calibration
[#8 in Elevators and Robot Adjustment Series] 111
TESTING ELEVATOR AND ROBOT CALIBRATION
ADJUSTMENTS - RUNNING A SHORT CYCLE TO OBSERVE
WAFER HANDLING 115
[#9 in Elevators and Robot Adjustment Series]
SLURRY SYSTEM 117
Slurry Flow Calibration 117
Slurry pH Transmitter Calibration 122
SPINDLES 125
Backpressure Calibration 125
Down Force E - P Regulator Calibration 135
Load Current Calibration 140
Polish Force Dead Weight and Scale Factor Calibration 143
Spindle Move Down Calibration 154
Wafer Blow Off Pressure Calibration 158
TABLES 160
Load Current Calibration 160
Thermocouple Calibration 163
Table Temperature Control Unit Operation 168
Filterine Temperature Control Unit 169
Neslab Temperature Control Unit 170
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