Maintenance Model 6DS-SP Planarizer
x Version 4.0 - February 1998
Chapter 11 Pneumatic Adjustments 11-1
Overview 3
Cleaning Stations 4
Cleaning Stations Adjustment Series--Order of Adjustment 4
Cleaning Station Device Up/Down Adjustments 5
[#2 in Cleaning Stations Adjustment Series] 5
Cleaning Station Pad Pressure Adjustments 8
[#4 in Cleaning Stations Adjustment Series] 8
Conditioning Arm 11
Conditioning Arm Adjustment Series--Order of Adjustment 11
Conditioning Arm Pressure 12
[#2 in Conditioning Arm Adjustment Series] 12
Conditioning Device Air Cylinder Adjustment 16
[#3 in Conditioning Arm Adjustment Series] 16
Load Stations 19
Load Chuck Raise Pressure 19
Left Load Chuck Raise Pressure 19
Right Load Chuck Raise Pressure 22
Shuttle 23
Shuttle Flow Control Adjustments 23
Slurry System 27
Slurry Diaphragm Pump Pressure 27
Spindles 29
Spindle Move Down Speed 29
Spindle Carrier Blow Off Pressure 33
Chapter 12 Software and Control Computer
Maintenance 12-1
Overview 3
6DS-SP Computer Setup 4
Hardware Setup 4
PC-DOS and Configuration Setup 5
Backing Up Polish Recipes and Machine Data Files 7
Restoring Polish Recipes and Machine Data Files 9
Other Useful Software Procedures 10
Exiting to the DOS System Prompt from the 6DS-SP Control Program
Menus 10
Formatting Diskettes 11
Starting the 6DS-SP Control Program at the DOS Prompt 12
6DS-SP Date and Time Setting 13
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