Ulvac G-20DA - Page 33

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Trouble Cause Procedure Note
⑧ Leakage from the tube
connection with the pump
⑨ Applying no specified oil
⑩ No circulating oil.
Clogging the oil aperture of
the pump cover
⑧ Detect leakage by the leak
detector, and stop leakage
⑨ Charge specified oil after
overhauling or repairing
⑩ Overhauling and repairing,
clean the oil aperture
6.3
Unusual sound ① Abnormal input voltage
② Inferior motor
③ Coming different objects into
the pump
④ Insufficient quantity of the
oil
⑤ broken the spider of coupling
⑥ No circulating oil. Clogging
oil aperture of the pump cover
⑦ Internal parts damaged
① Adjust input voltage within
±10%
② Replace motor
③ Eliminate different objects
then overhaul and repair the
pump
④ Fill the oil up to the
specified quantity
⑤ Change the spider of coupling
⑥ Overhauling and repairing,
clean the oil aperture
⑦ Overhauling and repairing
(Replace parts)
3.5
3.2
6.4
Abnormal high
temperature on the
pump surface
R.T > +50 ℃
① Continuous operating at high
suction pressure
② Insufficient quantity of
the oil(Oil shortage, low
cooling effect)
③ High temperature
evacuating gases
④ No circulating oil. Clogging
the oil aperture of the pump
cover
① Temperature of the pump
surface will be 80℃
during continuous
operation, but no problem
happened
② Fill the oil up to the
specified quantity
③ Set the gas cooling unit on
suction side
④ Overhauling and repairing,
clean the pump aperture
3.2
Oil spouting from
exhaust port
① Too sufficient oil
quantity for the specified
level
② Continuous operating at
igh suction pressure
① Drain the oil to the
specified level
② Set oil mist-trap on
exhaust side
3.2
4.6
Oil leak out of the
pump
① O-rings or oil seals of the
case or the cover
① Inspect and replace o-ring
or oil seals
6.2