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Ulvac G-20DA - Page 32

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‐22‐
6.5 Trouble Check List
Table-3 Trouble Check List
Trouble Cause Procedure Note
No rotating pump ① No connecting power
② Power switch off
③ Abnormal input voltage
④ Overload relay operated
⑤ Inferior motor
⑥ High oil viscosity at low
temperature
⑦ Sticking the rotor by coming
different objects into the
pump
⑧ Generating rust inside the
pump by evacuating water
vapor or solvent
⑨ After evacuating reactive
gases, reacted materials
deposited inside the pump
⑩ Internal parts damaged
① Connect power cord
② Turn on power switch
③ Adjust input voltage within
±10%
④ Reset button switch
⑤ Replace motor
⑥ Warm atmosphere above +7℃
⑦ Overhaul and repair
(change cylinder or rotor)
⑧ Overhaul and repair
(change cylinder or rotor)
⑨ Overhaul and repair
(clean and eliminate any
reacted materials inside the
pump)
⑩ Overhaul and repair
(change the parts)
3.4
4.2
3.5
4.5
6.2
6.2
Irregular rotation of
the pump
① Abnormal input voltage
② Inferior wire connect ion to
the pump
③ High oil viscosity at low
temperature
④ Coming different objects into
the pump
① Adjust input voltage within
±10%
② Connect wire again to the
pump
③ Warm atmosphere above +7℃
④ Eliminate different objects
then overhaul and repair the
pump
3.5
3.4
4.5
No pressure reduction ① Low pumping capacity for
vacuum vessel volume
② Vacuum pressure measuring is
not correct
③ Inadequate applying vacuum
gauge
④ Small diameter and long
suction tubing
⑤ Clogged the different objects
on the mesh filter inside the
inlet port
⑥ Insufficient quantity of the
oil
⑦ Oil deteriorated
① Re-select the pumping
capacity
② Measure the vacuum pressure
correctly
③ Apply the corrected vacuum
gauge adapted to measuring
pressure range
④ Connect same diameter tubing
with inlet port(suction) and
short distance to the vacuum
vessel
⑤ Disconnect the suction
tubing, clean the mesh
filter
⑥ Fill the oil up to the
specified quantity
⑦ Change the oil
5.2
5.1
5.1
6.2
3.2
6.3