ADT 7100 - Page 25

ADT 7100 User Manual Operating Procedure
7. Place the Allen Wrench at the end of the spindle with the larger diameter part all the way
against the spindle. Engage the Spanner Tool onto the Spindle Nut. Never use the Torque Wrench
to remove the blade as this may damage the Torque Wrench.
8. Remove the Holding Nut by turning the silver Spanner Tool counter-clockwise while holding the
red-handled Allen Wrench. If you cannot remove the nut or blade, do not force it. Create a
helpdesk ticket.
9. Remove your Blade using the Blade Handling Tool.
10. Also, remove the thin silver spacer from the spindle, if applicable.
11. Close the blade cover.
12. Move the locking lever to the right to lock the blade cover in place.
13. Close the cutting chamber cover.
14. Click Cancel in the wizard.
Powering down the system and finishing up
1. Ensure that the system has stopped operation (blade, spacer, and sample are out of the tool). Do
not log out, as it will cause database problems. You must be logged in to shut the saw down.
Shutting down the tool incorrectly may result in loss of access.
2. Press the Stop>OFF button . The system stops, and a pop-up message appears on the
screen. Do not click Yes or No on the screen to power off.
3. Wait two seconds and press the Stop>OFF button again.
4. The down powering process takes 1 to 1.5 minutes. Please wait until the tool has completely
shut down before leaving the area.
5. The nitrogen supply valve located on the wall behind the saw should be left open. The nitrogen
will be automatically turned off when the tool shuts down.
6. Ensure that the water filtration system is not running after the saw has completely turned off.
7. Fill out the logbook.
8. End your reservation.
9. Remove your wafer pieces from the blue tape. Discard the tape and return the frame to the
magazine located near the mounting station.
Filling out the Logbook
The logbook must be filled out after every reservation. It serves to track the tool performance and
materials processed. Also, you can record your recipe parameters in the comments section for future
reference. Finally, if the tool is getting low on log sheets, please make a helpdesk ticket to let staff know.
Lurie Nanofabrication Facility 2-17