Rev. AX5 Draft Page iii
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Acronym List
AMHS Automated Material Handling System
ASCII American Standard Coding for Information Interchange
ATR AdvanTag Reader
CAN Control Area Network
CIM Computer-Integrated Manufacturing
EMF Electromagnetic Field
EMI Electromagnetic Interference
EMO Emergency (Machine) Off
ESD Electrostatic Discharge
MID Material IDentification
OEM Original Equipment Manufacturer
PN or P/N Part Number
RFID Radio Frequency IDentification
SECS Semiconductor Equipment Communication Standard
SEMI Semiconductor Equipment and Materials International
SMIF Standard Mechanical Interface
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