Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
26
Temperature Both ambient and process gas: 0-70 °C.
Leak Integrity Outboard: 1 x 10
-9
mbar l/sec.
Helium
Warm-up time < 10 minutes; 1% F.S. accuracy.
Performance within specifications: 45 minutes.
Damping Damping from 0 to 10 seconds is possible for the flow output
signal(s) * (default setting is 0.5 sec.).
Response Standard response of the flow output signal 1 sec.
(Meters) Response up to 0.2 sec. on request.
Model 5864 3sec. (1 sec. on request)
Settling Time Standard 1 sec. Settling time or up to 0.2 seconds is
(Controllers) possible (to within 2% full scale of final value) for any
command (Set point) step; virtually without any dead time,
over- or undershoot. Model 5853S 3 sec. (1 sec. on
request).
* To be specified at ordering
Section 5: Specification
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