Brooks 5850 S - Appendix E: Modellist

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
44
Appendix E: Modellist
BROOKS SMART MASS FLOW PRODUCTS
SMART MASS FLOW METERS / CONTROLLERS
BASE M ODEL NUM BER DESCRIPTION
5860S/BA MASS FLOW METER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
5860S/BC MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
5861S/BD MASS FLOW METER; F.S. FLOWRANGES: 20 - 100 ln/min.
5863S/B
E
MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min.
5863S/BF MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min.
5863S/BG MASS FLOW METER; F.S. FLOWRANGES: 300 - 400 ln/min.
5863S/BH MASS FLOW METER; F.S. FLOWRANGES: 400 - 500 ln/min.
5863S/BJ MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min.
5863S/BK MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min.
5863S/BL MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min.
5863S/BM MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min.
5863S/BN MASS FLOW METER; F.S. FLOWRANGES: 900 - 1000 ln/min.
5863S/B1 MASS FLOW METER; F.S. FLOWRANGES: 1001 - 1100 ln/min.
5863S/B2 MASS FLOW METER; F.S. FLOWRANGES: 1101 - 1300 ln/min.
5863S/B3 MASS FLOW METER; F.S. FLOWRANGES: 1301 - 1600 ln/min.
5863S/B4 MASS FLOW METER; F.S. FLOWRANGES: 1601 - 1900 ln/min.
5863S/B5 MASS FLOW METER; F.S. FLOWRANGES: 1 901 - 2200 ln/min.
5863S/B6 MASS FLOW METER; F.S. FLOWRANGES: 2201 - 2500 ln/min.
5850S/BA MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
5850S/BC MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
5851S/BD MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min.
5853S/B
E
MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min.
5853S/BF MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min.
5853S/BG MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min.
5853S/BH MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min.
5853S/BJ MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min.
5853S/BK MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min.
5853S/BL MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min.
5853S/BM MASS FLOW CONTROLLER; F.S. FLOWRANGES: 800 - 900 ln/min.
5853S/BN MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min.
5853S/B1 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1001 - 1100 ln/min.
5853S/B2 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1101 - 1300 ln/min.
5853S/B3 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1301 - 1600 ln/min.
5853S/B4 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1601 - 1900 ln/min.
5853S/B5 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1 901 - 2200 ln/min.
5853S/B6 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 2201 - 2500 ln/min.
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