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Brooks 5850 S - Alarms

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Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
8
selectable soft start
adaptive valve control
Adaptive filtering for signal flow component
Alarms
Self-diagnostic
EEPROM error
database error
analogue output error
Out-of-range indications
for analogue set points higher than 100% (controller only)
flow
valve (controller only)
analogue output
Environmental errors
no gas flow detected
power supply outside specification range
ambient temperature outside specified range
high and low flow alarms
Section 1: Introduction
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