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OPERATOR MAINTENANCE
Leak Verification, Y/N?
Verify that the oven is leaking and not experiencing outgassing from residual contamination.
1. If the oven is hot, allow it to cool to room temperature.
2. Evacuate the chamber to the lowest achievable pressure.
3. Write down the pressure displayed on the Vacuum Gauge as a positive number.
4. Isolate the chamber by closing the vacuum valve.
5. Monitor the vacuum gauge for 1 hour. If the pressure on the gauge increases, this may indicate a
significant leak.
6. Monitor the gauge for another hour.
• If the pressure level stabilizes, the initial rise in pressure may be caused by residual
material in the chamber outgassing, increasing the pressure.
• If the pressure level continues to increase, record the pressure displayed on the Vacuum
Gauge at the end of the second hour. Include these findings in the Diagnostic Data Log.
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