16.3.9 Maintenance
16.3.9.1 Service
Any precision instrument such as a mass flow controller requires occasional servicing. It
is especially important to perform this service if the flow controller has been operating
for an extended period of time or has been subjected to corrosive gases or other gases
which leave excessive residue. If non-reactive gases are used, service your flow
controller annually. If reactive gases are used, the flow controller should be serviced
every six months. Due to the high service temperature, low particle count, and high leak
integrity all High Temperature metal seal flow controllers must be returned to
Celerity for service.
23
©2005 Celerity
, Inc.
#199-001-0006 REV
.F 4/05
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