EBARA ESA200W - Page 17

（xv）
PM10U
EBARA
CORPORATION
Contents
Environmental Basic Policies........................................................................... i
Safety Information ............................................................................................ ii
Important Prior Warnings................................................................................iii
Safety Interlocks .............................................................................................. xi
Standard Limited Warranty ........................................................................... xiii
Declaration of Conformity............................................................................. xiv
Contents .......................................................................................................... xv
1. Foreword..................................................................................................... 1
2. Introduction ................................................................................................1
2.1 Introduction .......................................................................................... 1
2.2 Environmental Concerns..................................................................... 2
3. Product Description................................................................................... 3
3.1 Outline...................................................................................................3
3.1.1 Pump Module ................................................................................3
3.1.2 N2 Gas ...........................................................................................3
3.1.3 Cooling Water ...............................................................................4
3.1.4 Exhaust..........................................................................................4
3.2 Control System .................................................................................... 4
3.2.1 Warning .........................................................................................4
3.2.2 Operation Status Control .............................................................5
3.3 The way of pump moving.................................................................... 5
3.3.1 Preparation....................................................................................5
3.3.2 Moving method .............................................................................5
3.4 Utility Disconnection............................................................................ 6
3.4.1 Electrical Power - Circuit Breaker Lockout and Tagout ............6
3.4.2 Cooling water ................................................................................7
3.4.3 Nitrogen (N
2
)..................................................................................7
3.4.4 Returning to Service .....................................................................7
3.5 Detailed Specifications........................................................................ 8
Specification.............................................................................................8
Outline Drawing........................................................................................9
Performance Curve................................................................................10
System Flow ...........................................................................................11
4. Installation ................................................................................................ 12
4.1 Movement and Fixation ..................................................................... 12