EBARA ESA200W - Page 18

（xvi）
PM10U
EBARA
CORPORATION
4.1.1 Location.......................................................................................12
4.1.2 Caster and adjustment foot .......................................................12
4.1.3 Pump Fixation .............................................................................13
4.2 Piping.................................................................................................. 15
4.2.1 Vacuum and Exhaust Piping......................................................15
4.2.2 Cooling Water Piping..................................................................16
4.2.3 N2 Gas Piping .............................................................................17
4.2.4 Ventilation Duct ..........................................................................18
4.3 Electrical Wiring................................................................................. 20
4.3.1 Grounding ................................................................................... 20
4.3.2 Power Supply Wiring .................................................................. 21
4.3.3 Control Signal Wiring .................................................................22
4.3.4 Additional Emergency Off (EMO) input.....................................27
5. Power Supply for accessories ................................................................ 28
6. LCD Controller.......................................................................................... 29
6.1 LCD Outline ........................................................................................ 29
6.2 LCD Indication.................................................................................... 30
6.3 Setting the operational mode............................................................ 34
6.3.1 Setting the pump operation control mode................................35
6.3.1 Setting the pump operation control mode................................36
6.3.2 Setting the DIP switch ................................................................ 36
6.3.3 Setting the pump running mode................................................37
6.3.4 Setting the BP normal rotational speed.................................... 37
6.3.5 Setting the rotational speed in the LOW SPEED mode ...........
37
6.3.6 Setting the pump N2 flow low warning threshold.................... 38
6.3.7 Setting the dilution N2 0mode warning threshold (option) .....38
6.3.8 Setting the rotational speed in the SAVE ENERGY mode....... 39
6.3.9 Setting the WARNING value for the back pressure (option) ... 39
6.3.10 Setting the Back Pressure high warning threshold (option).
40
6.3.11 Pump Valve control (option) .................................................... 40
6.4 Dip Switch........................................................................................... 41
6.5 DIP Switch setting display ................................................................ 44
7. Operation .................................................................................................. 47
7.1 Before Starting ...................................................................................
47
7.2 START/STOP ......................................................................................50
7.2.1 LOCAL Start/Stop .......................................................................52
7.2.2 REMOTE Start/Stop ....................................................................52
7.2.3 COMMUNICATION Start/Stop ....................................................53