EBARA ESA200W - Page 19

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PM10U
EBARA
CORPORATION
8. Maintenance and Inspection ................................................................... 54
8.1 Internal energies ................................................................................54
8.1.1 Power source .............................................................................. 54
8.1.2 Cooling water ..............................................................................54
8.1.3 Nitrogen gas................................................................................54
8.2 Routine Inspection............................................................................. 55
8.3 Vacuum and Exhaust Piping............................................................. 57
8.4 Lubricant Oil....................................................................................... 58
8.5 Spare (Maintenance) Parts List......................................................... 61
8.6 List of wastes during maintenance .................................................. 62
8.7 Overhaul ............................................................................................. 63
9. Disconnection and Transportation......................................................... 64
10. Troubleshooting..................................................................................... 66
10.1 Troubleshooting (1) Basic trouble ............................................... 66
10.2 Troubleshooting (2) WARNING .................................................... 68
10.3 Troubleshooting (3) ALARM......................................................... 70
10.4 Troubleshooting (4) Option .......................................................... 73