EBARA ESA200W - Page 51

P.32
PM10U
EBARA
CORPORATION
Current
ENTER
Control mode: LOCAL, REMOTE, COM
Pump operational mode: NORMAL(rated), S. ENERGY (energy-saving)
A
larm histor
y
(
Indication of histor
y)
Pump unit No.
Total operation time
Back pressure (option)
Pump N2 gas flow
Cooling water flo
w
Pump casing temperature
Motor speed
002 51 00 ####
020901 12 : 25 : 26
Occurrence date
History No.
(The lower number. is newer.)
A
nalog value
A
larm 2nd code
A
larm 1st code
How to read the alarm histor
y
See Table 6.2 for the alarm codes.
ENTER
001 06 00 ####
020901 12：23：21
Displayed during ENTRY key pushed
ENTER
002 51 00 ####
020901 12：25：26
Displayed during ENTRY key pushed
WARNING：BP MOTOR
TEMP．HIGH
▽ △
A
LARM：CASING
TEMP．HIGH
UNIT NO
&&&&&&&&
OPE．TIME
#### h
BACK PRESSURE
##．# kPa
PUMP N2 FLOW
##．# Pam3/s
WATER FLOW
##．# L/min
CASING TEMP．
### °C
▽
△
▽
△
▽
△
CONTROL：LOCAL
MODE：NORMAL
A
LARM/WARNING
HISTORY？
▽
△
▽
△
BP: ##.# A
MP: ##.# A
BP SPEED
# ．# k min-1
Fig. 6.2 Key operation for the pump operation status
display screen
PUMP RUNNING
HISTORY？
ENTER
ENTER
001MP START
070101 12:00:00
ENTER
BP START/STOP
HISTORY
MP START/STOP
HISTORY
PRG.
PRG.
001BP STOP
070101 12:00:00
PRG.
Running history
(
Indication of histor
y)
▽
△
△
▽
PUMP TYPE ### V
ESA###
▽
△
PUMP Type
Voltage
PRG.
Heater temperature (option)
HT 1:### 2:###
°C 3:### 4:###
▽ △
▽
△
▽
△
▽
△
▽
△