EBARA ESA200W - Page 52

P.33
PM10U
EBARA
CORPORATION
Table 6.2 Alarm code list
Code Code
ALARM name
1st
code
2nd
code
WARNING name
1st
code
2nd
code
MP casing temp. 50 01 Low cooling water 00 01
BP motor temp. 51 00 MP casing temp. 05 01
MP motor temp. 52 00 BP oil level low 06 00
BP overload 1(Thermal) 54 00 MP oil level low 08 00
MP overload 1(Thermal) 55 00 Control board inner temp. 13 00
MP Current 0 60 00 Pump N2 18 00
BP Current 0 61 00 BP motor temp. 23 00
Power failure 64 00 MP motor temp. 24 00
BP driver protection activated (OC) 66 01 BP driver case temp. 25 02
BP driver protection activated (OV) 66 02 BP driver inner temp. 25 04
BP driver protection activated (OH1) 66 04 Inner communication error (BP driver) 26 02
BP driver protection activated (OH2) 66 05 Inner communication error (IO) 26 03
BP driver protection activated (CPF) 66 06 Inner communication error (A_IO) 26 04
BP driver protection activated (UV) 66 07 Inner communication error (C_IO) 26 07
BP driver protection activated (DRE) 66 09 BP current high 31 14
BP overload 2 67 00 MP current high 31 15
BP step out 69 00 Exhaust temp. 31 20
Low cooling water 73 90 BP casing temp. (▲) 05 02
Inner communication error (IO) 81 01 High back pressure (▲) 21 01
Inner communication error (BP driver) 81 02 Back pressure sensor damaged (▲)
BP current high 81 03 Heater1 error (▲)
Exhaust temp. 81 20 Heater1 sensor damaged (▲)
BP casing temp. (▲) 50 02 Heater2 error (▲)
Water leakage (▲) 53 00 Heater2 sensor damaged (▲)
High back pressure (▲) 63 00 Heater3 error (▲)
Emergency stop (EMO) (▲) 71 00 Heater3 sensor damaged (▲)
External interlock (▲) 74 00 Heater4 error (▲)
Heater4 sensor damaged (▲)
Heater thermostat (▲)
Pump N2 Valve Error (▲)
“▲” indicates that the item is optional.