Edwards ELD500 Series

D135-10-880C - Troubleshooting
Page 98
E43
Cathode current is too high!
MSV Cat-Heater >>
Signal MPKZH on MSV board is active. Cathode
current is too high, I > 3.6 A.
MSV is faulty.
E44 Cathode current is too low!
Signal MPKZN on MSV board is active. Cathode
current is too low, I < 0.2 A.
MSV is faulty.
Faulty ion source connector or cable.
W45
Emission for cathode 1 can not
be switched on!
Signal MSIBE on MSV board is not active. Emission
for cathode 1 can not be switched on. ELD500
switches to cathode 2. Order a new ion source.
Cathode 1 is defective
MSV board is defective
W46
Emission for cathode 2 can not
be switched.
Signal MSIBE on MSV board is not active. Emission
for cathode 2 can not be switched on. ELD500
switches to cathode 1. Order a new ion source.
Cathode 2 is defective.
MSV board is defective.
E47
Emission for both cathodes can
not be switched on!
Signal MSIBE on MSV board is not active. Emission
can not be switched on. Exchange the cathode by
changing the ion source. After having exchanged
the ion source it must be possible to switch on
both cathodes manually via the service menu.
Replace ion source.
MSV board is defective.
E48 Anode heater is faulty!
Signal MSAFD on MSV board is active. Anode
heater fuse has blown.
Replace fuse F2 on the MSV board.
E50
No communication with turbo
pump converter.
Clock from the frequency converter has failed. No
communication to the frequency converter.
Fuse F4 on the wiring backplane has blown.
Drive electronics Turbo Drive S is defective.
E51 Unknown TMP error
The frequency converter Turbo Drive S indicates
an unknown error code. Inform Edwards service
E52 TMP frequency is too low!
TMP frequency is too low!
Frequency converter is faulty.
Turbo molecular pump is faulty.
Table 24 Fault finding (continued)
No. Displayed message Description and possible solutions