D135-10-880C - Troubleshooting
Page 99
W53
Temperature at electronic unit
is too high (> 59 °C)
Ambient temperature too high.
Ventilation failure.
Air filter dirty and have to be changed.
E54
Temperature at electronic unit
is too high (> 60 °C).
Ambient temperature is too high.
Internal ventilation has failed.
Air filters are dirty and must be exchanged.
W55
Temperature at electronic unit
is too low (< 2 °C)
The temperature sensor on the wiring plane
indicates T < 2 °C. Run-up time for the fore vacuum
pump will be longer.
Temperature sensor is faulty.
Ambient temperature is too low.
E56 Inlet pressure p1 too low!
Output voltage Pirani P1 U < 0.27 V.
Pirani sensor P1 is defective.
Pirani electronics on the I/O board is defective.
E58
fore vacuum pressure p2 too
low!
Output voltage Pirani P2 U < 0.27 V.
Pirani sensor P2 is defective.
Pirani electronics on the I/O board is defective.
E60
p2 > 10 mbar after 5 minutes
since power on
Run-up time of the fore vacuum pump is too long.
Fore pump is faulty.
Valve V2 does not open.
Leak in the high vacuum system.
E61 Emission fail.
Emission could not be switched on. MSV
sub-assembly indicates a fault. MENB emission
current not within range.
MSV board is defective.
Both cathodes are defective, replace ion source.
W62 Flow through capillary to low.
In the sniffer mode the intake pressure of the
sniffer line is controlled. If the pressure falls below
the minimum limit, the flow through the capillary
is too low (contamination) or the capillary is
blocked (foreign objects, particles).
The minimum limit can be set by the menu.
Default value is 0.05 mbar.
Filter in the tip is clogged.
Table 24 Fault finding (continued)
No. Displayed message Description and possible solutions
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