Edwards ELD500 Series

D135-10-880C - Troubleshooting
Page 100
W63 Capillary broken
In the sniffer mode the intake pressure of the
sniffer line is controlled. If the pressure exceeds
the maximum limit, the flow through the capillary
is too high (no leak tightness, broken capillary).
The maximum limit can be set by the menu.
Default value is 0.15 mbar.
The capillary is broken or has been torn off.
E64
TMP error: Nominal speed has
been exceeded by over 10%
Nominal speed of the pump has been exceeded by
over 10%
EMC problems: Check connecting cable, insert it
properly. Switch the power supply voltage off and
then on again.
Turbo.Drive S faulty: Inform Edwards Service
E65
TMP error: Pass through time
exceeded
Maximum time for passing through the critical
frequencies has been exceeded.
Fore vacuum or high-vacuum pressure to high:
Reduce the inlet pressure of the ELD500
Bearing defective: Inform Edwards service for
repair
E66
TMP error: Bearing
temperature too high (> 67 °C)
Maximum bearing temperature has been
exceeded
Fore vacuum or high-vacuum pressure to high:
Reduce the inlet pressure of the ELD500
Fan defective: Replace the fan
Ambient temperature too high: Feed cooler air to
the ELD500
Bearing defective: Inform Edwards service for
repair
E67
TMP error: Short circuit in
TMP-motor or connecting
cable
Short circuit in the pump’s motor or the
connecting cable
Check to see if the connecting cable is undamaged,
exchange if required.
Inform Edwards service in case of short circuit in
TMP motor
Table 24 Fault finding (continued)
No. Displayed message Description and possible solutions