Edwards STP-1003 Series

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STP Series Turbomolecular Pump

MT-00E-001-M

Page 28

INSTALLATION OF THE STP PUMP

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Table of Contents3
Introduction7
Scope and Definitions7
Electromagnetic Compatibility8
Limited Warranty8
Item Warranted8
Disclaimer9
Spare Parts9
Precautions for Safe Operation of the STP Pump10
Usable Gases10
STP Pump Installation Warning Label11
Hot Surface Warning Label11
Maintenance and Inspection Precautions11
Labels11
Heavy Product Caution Label12
Connector Caution Label12
Caution Label12
TMS Heater Caution Label13
Operation Principle of the STP Pump14
Temperature Management System15
Name of the STP Pump16
Installation of the Stp Pump19
Precautions before Installation19
Operating Environment19
Installation Area21
Bench22
Example of Lifting the STP Pump23
Unpacking23
Unpacking the STP Pump23
Example of Lifting the STP Pump (Horizontal Positioning)24
How to Install the STP Pump26
Installation of the STP Pump to the Vacuum Equipment27
Cleaning the Seal28
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump29
STP Pump Installation Positions29
Secure the STP Pump30
Precautions of Vacuum Piping30
Vacuum Piping Method31
Positions of the Cooling Water Port and Baking Heater32
Connecting the Purge Port32
Connecting the Water Cooling Pipe32
Attaching a Baking Heater33
Installation of the Air Cooling Unit33
2.3.10 Installation of the TMS Unit33
Installation of the Stp Control Unit35
STP Control Unit35
SCU-350 Series35
Scu-800/80136
Scu-80036
Scu-80136
Scu-1600/160137
Scu-160137
Cable Connection38
STP Connection Cable38
Power Cable39
How to Connect the Cables40
Operation43
Before Starting the STP Pump43
Tuning43
Operation of Vacuum System44
Pump Operation44
LED Indication During Operation44
Starting the STP Pump after a Safety Function Operates45
Gas Pumping, Cooling and Baking the STP Pump45
Gas Pumping45
How to Introduce a Purge Gas46
Cooling the STP Pump46
Water-Cooling Method46
Air-Cooling Method47
Baking the STP Pump47
How to Use the TMS Unit48
Parameter Set Mode48
Starting/Stopping the TMS Unit48
Temperature Control48
Safety Functions49
Power Failure49
Operation after a Power Recovery49
Abnormal State of Magnetic Bearing50
Excessive Vibration50
Motor Driver Overload50
Overheating Inside the STP Pump50
Overheating Inside the STP Control Unit51
Overspeed51
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)51
Failure of the Air-Cooling Fan (for SCU-800/801, SCU-1600/1601)51
Maintenance and Inspection53
Cleaning54
Inspecting the Deposit54
Maintenance55
Recommended Overhaul Intervals55
Standard Replacement Parts55
Recommended Maintenance Intervals for Main Parts56
Transporting for Repair or Overhaul57
Storage and Disposal59
Storage of the STP Pump59
Disposal60
Service, Spares and Accessories61
Introduction61
Service61
Spares61
Accessories62

Edwards STP-1003 Series

Table of Contents

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