EasyManua.ls Logo

Edwards STP-iXR1606

Edwards STP-iXR1606
169 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 135
7
SAFETY FUNCTIONS
1 cycle
Imbalance
(1 flash in orange)
OFF
Warning detection
"FAILURE" LED indication
X2 REMOTE output
ON
Pump Run Time Over
Pump Overload
(2 flashes in orange)
First Damage Limit
Second Damage Limit
(3 flashes in orange)
Corresponding to
warning type
OFF
OFF
ON
ON
Close
Open
WARNING N.O OUT
between (6)–(24)
WARNING N.C OUT
(6)–(25)
Open
Close
Figure 51 - WARNING output
Note: The WARNING detection cannot be reset by the "RESET" operation.
See Section 7.4, "WARNING function setting" for the releasing the WARNING detection.
The STP pump can operate even when the WARNING is detected.
Overhaul the STP pump when WARNING detection is indicated.

Table of Contents

Related product manuals