Inficon Gemini MPG504

tina83e1-d (2018-12) 13
Grounding concept
→
"Power Connection"
Vacuum connection – signal
common
connected via 10 kΩ
(potential difference ≤16 V)
Supply common – signal
common
conducted separately;
differential measurement is
recommended
Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament (
MPG5xx)
W
Feedthrough, MAG/MPG5x0
Isolation
Ring
Anode
Pin
glass, ceramic (Al
2
O
3
)
stainless steel (1.4435)
molybdenum
Ni alloy
Feedthrough, MAG/MPG5x4
ceramic coated
Anode molybdenum
Ionization chamber
3Mxx-0xx-xxxx
stainless steel
(1.4301, 1.4016)
3Mxx-
1
xx-xxxx
Ti
Ignition aid stainless steel
(1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R
≈19.9 cm
3
≈20.9 cm
3
≈25.2 cm
3
≈
25.6 cm
3
Permissible pressure
(absolute)
10 bar, limited to inert gases
<55 °C
Bursting pressure (absolute)
>13 bar