(The next two options require user input for the calculation)
FIGURE 6
Bulk Resistivity for Wafers – this can be used where the bulk resistivity of
a thin material is required. It outputs the current setting and voltage
measurement, along with the calculated Bulk Resistivity. For this type of
measurement it is necessary to input the sample thickness in centimetres (on
the left in Figure 6) I.e. for a typical wafer thickness of 600 microns, the
thickness is 0.06cm.
Bulk Resistivity – this can be used where the bulk resistivity of a large
piece of material is required (typically samples > 5x probe spacing). It
outputs the current setting and voltage measurement, along with the
calculated Bulk Resistivity. For this type of measurement it is necessary to
input the probe spacing in centimetres (on the right in Figure 6) I.e. for a
typical probes spacing of 1.00mm, the spacing is 0.1cm.
When you have chosen your output and, if necessary, inputted the required
information, click ‘browse’ to select an output file name and location on
your computer. The program will output the results in a CSV format (comma
separated variable) which can be displayed on the vast majority of spread
sheet programs.
FIGURE 7
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