on the unit can be deleted by pressing and holding the Store button until the
display shows that the readings are being deleted. Stored measurements can
be retrieved from the unit with the RM3000 software. Readings are time-
stamped using an on-board clock.
System Test
The RM3000 is supplied with a 100 ohm test resistor. When this resistor is
plugged into the rear of the unit and the Mode/Test button is pressed the
RM3000 will perform a self test against an internal reference (this process
takes several minutes).
Mode
The mode button allows user adjustable settings to be changed. Pressing and
holding the Mode/Test button enters the adjustment menu where the
following items can be changed:
1. V Correction. This multiplies the measured voltage by the correction
factor entered here, for instance if readings need to be corrected for sample
size. The correction can be entered by using the keypad and the stored by
pressing ‘Store’. Displayed voltages will be shown having been multiplied
by the correction factor, and if this is the case an asterisk (*) will be shown
on the display to indicate that the voltage has been adjusted. The correction
can be removed by setting the correction to 1.00, by setting the unit to its
default settings or by switching the unit off and on.
2. Wafer thickness. Here the thickness of wafers being measured can be
entered (in cm). This enables the unit to display the value of such items in
ohm.cm. The default setting is 650 microns (0.065cm). This setting is held
in non-volatile memory and so will not change when the unit is switched off.
It can be returned to the default value manually or by resetting the RM3000
to its default settings.
3. Probe spacing. The probe spacing (in cm) can be entered here. This
enables the unit to display the volume resistivity of bulk samples in ohm.cm.
The default setting is 0.1000 (1mm spacing). This setting is held in non-
volatile memory and so will not change when the unit is switched off. It can
be returned to the default value manually or by resetting the RM3000 to its
default settings.
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