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B1500A Series
Keysight B1500A Series User Manual
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Keysight B1500A
Semiconductor Device
Analyzer
Configuration and
Connection Guide
2
Table of Contents
Default Chapter
2
Declaration of Conformity
2
Table of Contents
3
1 B1500A Product Configuration
5
Product Line up of the B1500A Series
6
Options of B1500A Series
10
Furnished Accessories
14
Upgrade Products for the B1500A Series
24
Option of B1500AU Upgrade Kit
24
About Plug-In Modules
28
Module Type and Locations
29
Maximum Module Configuration
30
Limitation by Installing B1500AU-030 WGFMU
30
Easyexpert and Desktop Easyexpert Software
31
Functions and Capabilities
31
Operation Mode
31
Application Library
32
Oscilloscope View
32
Workspace and Data Management
33
External Instrument Control
33
Furnished Software
33
Desktop Easyexpert Software
34
System Requirements
35
License Management Tool
37
B1542A Pulsed IV Package for B1500A
39
2 B1500A Accessories
43
Accessories for the B1500A
44
SMU Cables
44
CMU Accessories
46
HVSPGU Accessories
48
WGFMU Accessories
50
Test Fixture
52
Other Accessories and Interlock
54
Rack Mount Kit for Keysight Standard Cabinet
59
Accessories for the Wafer Prober / Connector Plate
60
3 Connection Guide for Wafer Prober
63
SMU/GNDU Connection with Prober
64
GNDU Connections
65
Non-Kelvin Connection
65
Kelvin Connection
66
SMU Connections
67
Non-Kelvin Connection
67
Kelvin Connection
68
Kelvin to Non-Kelvin Connection
69
MCSMU Connections
70
Connection for Low Current Measurement
74
To Make Connection to Reduce Leakage Current
74
Guarding
74
Connection for Low Resistance Measurement
76
To Make Connection to Measure Low Resistance
76
Kelvin Connection
76
SCUU and ASU
78
SCUU Positioner-Based Probing Connection
78
ASU Connection
79
WGFMU and RSU
81
Connecting RSU
81
Connecting RF Probes
83
Connecting DC Probes
86
Interlock Circuit
88
Installing the Interlock Circuit
88
To Connect Interlock Circuit
90
4 Connection and Ordering Examples
91
Two Terminal Device
92
General IV Characterization
92
General IV/CV Characterization
94
High Resolution IV Characterization
96
Four Terminal Device
98
General IV Characterization, Migration from 4155
98
General IV/CV Characterization
100
High Resolution IV Characterization, Migration from 4156
102
High Resolution IV Characterization (ASU)
104
High Power IV Characterization
106
Ms Pulse IV Characterization (MCSMU)
108
Ms Pulse IV Characterization (Two MCSMU)
110
Flash Memory Cell Characterization (2 Pulse Channels)
112
Flash Memory Cell Characterization (3 or 4 Pulse Channels)
114
Configuration Example of WGFMU
116
Ultra-Fast 1 Us NBTI Characterization Using the B1530A WGFMU Module
116
4
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Keysight B1500A Series Specifications
General
Brand
Keysight
Model
B1500A Series
Category
Measuring Instruments
Language
English
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