Keysight B1500A Series - High Resolution IV Characterization, Migration from 4156

4-12 Keysight B1500A Configuration and Connection Guide, Edition 6
Connection and Ordering Examples
Four terminal device
4.2.3 High resolution IV characterization, Migration from
4156
Figure 4-6 Precision IV configuration
Table 4-16 Target device and application
Table 4-17 Key specification
Device Application Note
FET I
d
-V
d
, V
th
, BV
dss
, I
d
leak, I
g
leak
Item Range Note
Maximum I/V range 100 mA / 100 V
Minimum I/V resolution 1 fA / 0.5 V
HRSMU
Triaxial cable
Sense
Force
B1500A
HRSMU
Sense
Force
Interlock cable
HRSMU
Sense
Force
HRSMU
Sense
Force
Connector plate
Fixture/Prober
DUT
Interlock
Coverage of Configuration Example
G
D
Subs
S