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CONTENTS
1. GENERAL DESCRIPTION .......................................................................................................1- 1 to 1-13
1.1 System Configuration........................................................................................................................ 1- 3
1.1.1 A273UHCPU System overall configuration ................................................................................ 1- 3
1.1.2 A173UHCPU(-S1) System overall configuration........................................................................ 1- 4
1.2 Table of Software Package............................................................................................................... 1- 5
1.3 Positioning Control by the Servo System CPU ................................................................................. 1- 6
2. PERFORMANCE SPECIFICATIONS........................................................................................2- 1 to 2- 4
2.1 SCPU Performance Specifications ................................................................................................... 2- 1
2.2 PCPU Performance Specifications ................................................................................................... 2- 3
3. POSITIONING SIGNALS..........................................................................................................3- 1 to 3-54
3.1 Internal Relays .................................................................................................................................. 3- 2
3.1.1 Axis status .................................................................................................................................. 3- 7
3.1.2 Axis command signals............................................................................................................... 3-16
3.1.3 Common Device........................................................................................................................ 3-22
3.2 Data Registers ................................................................................................................................. 3-33
3.2.1 Monitoring data area.................................................................................................................. 3-36
3.2.2 Control change registers ........................................................................................................... 3-41
3.2.3 Common devices....................................................................................................................... 3-42
3.3 Special Relays (SP.M) ..................................................................................................................... 3-48
3.4 Special Register (SP.D) ................................................................................................................... 3-51
4. PARAMETERS FOR POSITIONING CONTROL.....................................................................4- 1 to 4-25
4.1 System Settings ................................................................................................................................ 4- 1
4.2 Fixed Parameters.............................................................................................................................. 4- 2
4.2.1 Setting the number of pulses per revolution / travel value per revolution /
unit magnification........................................................................................................................ 4- 3
4.2.2 Upper stroke limit value/lower stroke limit value ........................................................................4- 5
4.2.3 Command in-position range ....................................................................................................... 4- 6
4.3 Servo Parameters ............................................................................................................................. 4- 6
4.3.1 Servo parameters of ADU (only when A273UHCPU is used) .................................................... 4- 7
4.3.2 MR-
-B servo parameters ......................................................................................................... 4- 9
4.3.3 Position control gain 1, 2 ........................................................................................................... 4-14
4.3.4 Position control gain 1, 2 ........................................................................................................... 4-15
4.3.5 Speed integral compensation.................................................................................................... 4-15
4.3.6 In-position range........................................................................................................................ 4-16
4.3.7 Feed forward gain...................................................................................................................... 4-16
4.3.8 Load inertia ratio........................................................................................................................ 4-16
4.3.9 Automatic tuning........................................................................................................................ 4-16
4.3.10 Servo responsiveness setting.................................................................................................. 4-17
4.3.11 Notch filter ............................................................................................................................... 4-18
4.3.12 Electromagnetic brake sequence............................................................................................ 4-18
4.3.13 Monitor output mode................................................................................................................ 4-18
4.3.14 Optional function 1 (carrier frequency selection)..................................................................... 4-18
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