The magnification error is specified as
±0.1% or less for contour illumination, and the
tolerance for each measured point is tabulated below. (If the magnification error for
contour illumination falls within the tolerance, that for reflected illumination will also fall
within the specified tolerance of
±0.15%)
Measured point
(on the reading scale)
Tolerance Permissible range
100 mm
140 mm
±0.1 mm
±0.14 mm
99.9-100.1 mm
139.86-140.14 mm
TIP
A positive error, i.e. where ∆M is a positive value, means that the measured length L is
larger than the normal size (l×M), and vice versa for a negative error.
2 - 20 No.99MBA043A
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