EasyManuals Logo

MKS T3B Series User Manual

MKS T3B Series
59 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Page #26 background imageLoading...
Page #26 background image
20
The controller responds with the message [F value], where:
value: 00 = Torr (initial)
01 = mTorr
02 = mBar
03 = µBar
04 = kPa
05 = Pa
06 = cm H
2
0
07 = in H
2
0
If the pressure units are Torr, an example response is:
F 00
To change the units to mTorr, enter:
F 01
Note
The [F value] command assigns a label to the pressure units; it does not convert pressure
readings. Pressure readings are reported as a percentage (%) of full scale.
Enabling Backfill Valve Control
The Backfill Valve Control feature can open a pneumatic valve to assist in raising the system pressure to a
new setpoint. The messages described here enable and disable the feature and check which of those states is in
force.
Note
When the backfill valve control feature is enabled, process relay 2 is disabled. When the
backfill valve control feature is disabled, relay 2 is enabled. These features share the same
pins on the I/O connector.
The value of the [BEvalue] command determines whether the backfill valve control feature is enabled or
disabled:
BE0 = Disabled (default)
BE1 = Enabled
To report the status of the feature, enter:
RBE
The controller responds with the message [BEvalue], where:
BE0 = Disabled
BE1 = Enabled
Setting the Setpoint Backfill Limit
This parameter sets the point at which the backfill valve closes (the relay deactivates) and the feature turns
off. When the feature is turned off, a new setpoint must be entered before the feature can be enabled. The
value of this entry is defined as a percentage of the new setpoint value. The messages described here set and
report the backfill limit value.
The [BLvalue] command sets the value of the backfill limit, where:
value is a percentage of the new setpoint, from 0 to 100% (default value is 95%)

Questions and Answers:

Question and Answer IconNeed help?

Do you have a question about the MKS T3B Series and is the answer not in the manual?

MKS T3B Series Specifications

General IconGeneral
BrandMKS
ModelT3B Series
CategoryControl Unit
LanguageEnglish

Related product manuals