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MKS T3B Series User Manual

MKS T3B Series
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49
Chapter Two: RS-232 Message Summary
The RS-232 messages required for operation of the device are listed below alphabetically—by command.
\
A0 Analog Setpoint Range (5v)
A1 Analog Setpoint Range (10v)
BD Backfill Delay
BE0 Backfill Valve Disable
BE1 Backfill Valve Enable
BL Backfill Control Limit
C Close Valve
CAL Set Operating Mode = CAL
CB Close Back Fill Relay
D0 Activate Analog Setpoint
D1 Activate Setpoint A
D2 Activate Setpoint B
D3 Activate Setpoint C
D4 Activate Setpoint D
D5 Activate Setpoint E
D6 Activate Analog Setpoint
D7 Restore local preset pressure
D8 Restore local preset position
EH Set Sensor Range High
EL Set Sensor Range Low
F Pressure Units (Torr, mbar, etc.)
FAC Set Operating Mode = FACTORY
G Sensor Signal Input Range
GC Set Gain Compensation Factor
H Hold Valve
HB Dump History Buffer To The Serial Port
I1 Set SoftStart Setpoint A % Value
I2 Set SoftStart Setpoint B % Value
I3 Set SoftStart Setpoint C % Value
I4 Set SoftStart Setpoint D % Value
I5 Set SoftStart Setpoint E % Value
I6 Set SoftStart Analog Setpoint % Value
I7 Set SoftStart Open Valve % Value
I8 Set Softstart Close Valve % Value
IE Interlock Enabled (0 or 1)
IL7 Set Local preset softstart pressure
IL8 Set Local preset softstart position
IX Reset (Power Cycle)
J Learn Valve T3X
JT
Set Valve Type 
L Learn the System (Pump Speed)
LA Select Auto-Dual Channel Operations
LD Auto Crossover Delay
LH Select High Channel Operations
LHC High Channel Crossover
LL Select Low Channel Operations
LLC Low Channel Crossover
LPF Set the Low-Pass Filter time constant (ms) for
reporting pressure (default:100ms)
M1 Gain Setpoint Value A
M2 Gain Setpoint Value B
M3 Gain Setpoint Value C
M4 Gain Setpoint Value D
M5 Gain Setpoint Value E
M6 Gain Setpoint Value Analog Setpoint
M7 Local preset pressure gain
MD Backfill Threshold Pressure
N Clear any overrides (e.g. open, close, hold)
N0 Set Valve Action Normal
N1 Set Valve Action Reverse
O Open Valve
OB Open Backfill Relay
OF1 Calibrate Analog Pressure Out Full Scale
OF2 Calibrate Analog Position Out Full Scale
OI1 Analog Out Pressure Input
OI2 Analog Out Position Input

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MKS T3B Series Specifications

General IconGeneral
BrandMKS
ModelT3B Series
CategoryControl Unit
LanguageEnglish

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