MKS T3B Series User Manual

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Table of Contents
Valve Safety Information ..................................................................................................................................1
Symbols Used in This Instruction Manual ....................................................................................................................1
Symbols Found on the Unit...........................................................................................................................................1
Safety Procedures and Precautions................................................................................................................................1
Sicherheitshinweise für das Ventil....................................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3
Erklärung der am Gerät angebrachten Symbole............................................................................................................3
Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................3
Informations de sécurité relatives au manomètre...........................................................................................5
Symboles utilisés dans ce manuel d’utilisation .............................................................................................................5
Symboles figurant sur l’unité ........................................................................................................................................5
Mesures de sécurité et précautions................................................................................................................................5
Medidas de seguridad del manómetro .............................................................................................................7
Símbolos usados en este manual de instrucciones.........................................................................................................7
Símbolos hallados en la unidad.....................................................................................................................................7
Procedimientos y precauciones de seguridad ................................................................................................................7
Chapter One: Remote RS-232 Operation.......................................................................................................9
RS-232 Protocol............................................................................................................................................................9
Special Commands supported (version 01.04.00 and newer).......................................................................10
Setup Messages ...........................................................................................................................................................12
Chamber Pump Speed .................................................................................................................................................24
Setpoint Messages.......................................................................................................................................................27
(code version 01.04.08 or newer)................................................................................................................................36
Control Messages ........................................................................................................................................................37
Slow Pump Introduction .................................................................................................................................42
Slow Pump Behavior...................................................................................................................................................43
Activation of Slow Pump ............................................................................................................................................44
Abortion of Slow Pump Abortion of slow pump occurs when the slow pump enable attribute is set to zero
(disabled). When slow pump is disabled, the controller approaches the setpoint at full speed, limited only
by controller tuning. Note: slow pump feature is not available in an Analog configured
valve.Informational Messages.....................................................................................................................................44
Informational Messages...............................................................................................................................................45
Chapter Two: RS-232 Message Summary....................................................................................................49

MKS T3B Series Specifications

General

Brand	MKS
Model	T3B Series
Category	Control Unit
Language	English