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MKS T3B Series User Manual
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Copyright © 2011 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any
form or by any means,
electronic or
mechanical, including
phot
ocopying and recording, or by any
information storage or retrieval
system, except as may be expressly permitted
in writing by MKS Instruments, Inc.
Printed in the United States of America
Firmware version: 01.05.0
1
3
5
Table of Contents
English
5
Table of Contents
5
Valve Safety Information
7
Symbols Used in this Instruction Manual
7
Symbols Found on the Unit
7
Safety Procedures and Precautions
7
Table 1: Definition of Symbols Found on the Unit
7
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
9
Tableau 3: Définition des Symboles Sur L'unité
11
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
13
Chapter One: Remote RS-232 Operation
15
RS-232 Protocol
15
Special Commands Supported (Version 01.04.00 and Newer)
16
Table 5: Message Syntax
16
Setup Messages
18
Table 6: RS-232 Setup Messages
18
Table 7: Sensor Range Values
29
Chamber Pump Speed
30
Setpoint Messages
33
Table 8: Setpoint Messages
33
(Code Version 01.04.08 or Newer)
42
Control Messages
43
Table 9: RS-232 Control Messages
43
Slow Pump Introduction
48
Slow Pump Behavior
49
Activation of Slow Pump
50
Valve.informational Messages
50
Informational Messages
51
Table 10: RS-232 Informational Messages
51
Chapter Two: RS-232 Message Summary
55
German
9
Sicherheitshinweise für das Ventil
9
In dieser Betriebsanleitung Vorkommende Symbole
9
Erklärung der am Gerät Angebrachten Symbole
9
Sicherheitsvorschriften und Vorsichtsmaßnahmen
9
French
11
Informations de Sécurité Relatives Au Manomètre
11
Symboles Utilisés Dans Ce Manuel D'utilisation
11
Symboles Figurant Sur L'unité
11
Mesures de Sécurité Et Précautions
11
Spanish
13
Medidas de Seguridad del Manómetro
13
Símbolos Usados en Este Manual de Instrucciones
13
Símbolos Hallados en la Unidad
13
Procedimientos y Precauciones de Seguridad
13
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MKS T3B Series Specifications
General
Brand
MKS
Model
T3B Series
Category
Control Unit
Language
English
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