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MKS T3B Series User Manual

MKS T3B Series
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23
Setting the Sensor Signal Input Range
Note
Be sure that the sensor is connected to the device before changing the sensor signal input
range.
The [G value] command sets the full scale voltage range for the pressure sensor input, where:
value: 0 = 1 Volt
1 = 5 Volts
2 = 10 Volts (initial)
To query the current range of the sensor signal input, issue the request:
R 35
The controller responds with the message [G value], where:
value: 0 = 1 Volt
1 = 5 Volts
2 = 10 Volts
If the sensor input has a full scale range of 10 Volts, an example response is:
G 2
To change the sensor signal input range to 5 Volts, enter:
G 1
Setting the Sensor Range
Note
Be sure that the sensor is connected to the device before changing the sensor range.
The [Ex value] command identifies the range of the sensor, in units, where x corresponds to either ‘H’ or ‘L’
for the H
igh or Low pressure sensor, and value corresponds to a valid sensor range, as listed in Table 7.
The device is initially configured to work with a 10 and a 1000 Torr pressure sensor. If your sensors cover
different pressure ranges, use this command to identify the range of your sensor.
Table 7: Sensor Range Values
Value Sensor Range Value Sensor Range
00 0.1 Torr 10 1000 Torr
01 0.2 11 5000
02 0.5 12 10000
03 1 13 1.33 mBar
04 2 14 2.66
05 5 15 13.33
06 10 16 133.3
07 50 17 1333
08 100 18 6666
09 500 19 13332

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MKS T3B Series Specifications

General IconGeneral
BrandMKS
ModelT3B Series
CategoryControl Unit
LanguageEnglish

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